Automated Optical Inspection／wafer surface inspection system／YGK Corporation

TOPICS

• Manufacture and sales for silicon wafer surface inspection system.
• Manufacture and sales for glass substrate and sapphire wafer surface inspection system.
• Manufacture and sales for SiC/GaN wafer surface inspection system.
• Manufacture and sales for specialized samples (film sheet etc) surface inspection system.
• Manufacture and sales for reticle/pellicle particle inspection system YPI-series.
• Achieving high accuracy particle measurement with isolating surface from back of transparent glass substrate by detecting separation between surface and back of it with sensor.
• Manufacture and sales for others process equipment and inspection system, and develop for firmware, software, mechanical design or circuit design.
• Manufacture and sales for ionizer related with ESD.（Details of ionizer are here.）
• Cleanness measurements by multipoint of inside equipment: Manufacture and sales for particle monitor.（Details of particle monitor are here.）

NEWS新着情報

2022. 9.10

Develop Full Surface Defect Inspection Technology for SiC Wafers
Used to Make Power Semiconductors
- High-speed imaging technology contributes to higher quality
SiC wafers -

2017. 4.12

Product introduction of the prober was added.⇒　

2017. 3.28

Product introduction of the loader/unloader system was added.
⇒　

2016.12.16

We exhibited to SEMICON JAPAN 2016.⇒　

2016.11.15

The result measurement of LT wafer was added to the YPI-MX-DC product introduction.
（Details are here.）

　

2016. 7. 8

The product introduction of the DF-100 (Compact and high performance AOI) was added.（Details are here.）

　

2016. 6. 3

The product introduction of particle monitor was added.
（Details of the particle monitor are here.）

2015.12.18

We exhibited SEMICON JAPAN 2015.⇒　

2015. 5.15

New released optional function was added to YPI series.

2015. 7. 3

The product introduction of DF-100 (Compact and high performance AOI) was added.

2015. 7. 3

Website was renovated.