Wafer surface particle scanner
YPI-MN（semi-automatic）
Laser inspection system for unpatterned wafer.
For process monitor.
For wafer cleaning process.
For R&D [None CE]
Spec
| Model | YPI-MN |
|---|---|
| Loading type | Manual loading |
| Dimension | (W)548 x (D)672 x (H)1009mm |
| Dimension (with stand) | (W)740 x (D)780 x (H)1430mm |
| Utility (Power) | AC200V |
| Utility (Vacuum) | -70kPa |
| Wafer type | Silicon, filmed wafer, GaAs, InP |
| Wafer size | 2-8inch |