Tape frame wafer surface particle scanner
YPI-MX TF FOUP
Laser inspection system for unpatterned dicing wafer with tape frame.
For develop & pilot process lines.
Spec
| Model | YPI-MX TF FOUP |
|---|---|
| Loading type | Auto loading |
| Dimension | (W)2330 x (D)1400 x (H)1820mm （１ FOUP） |
| (W)2520 x (D)1807 x (H)2007mm （Dual FOUP） | |
| Utility (Power) | AC200V |
| Utility (Vacuum) | -70kPa -60kPa -40kPa |
| Utility (Compressed air) | 0.6MPa |
| Wafer type | Tape frame wafer & Wafers |
| Wafer size | 12inch tape frame wafer |