Transparent wafer surface particle scanner
YPI-MX FOUP
Laser inspection system for unpatterned glass wafer.
For delivery inspection.
For wafer cleaning process.
Spec
| Model | YPI-MX FOUP |
|---|---|
| Loading type | Auto loading |
| Dimension | (W)2145 x (D)1340 x (H)1860mm |
| Utility (Power) | AC200V |
| Utility (Vacuum) | -70kPa -40kPa |
| Utility(Compressed air) | 0.6MPa |
| Wafer type | Silicon, Transparent wafer (Quartz, Glass) |
| Wafer size | 12inch |