Glass substrate inspection system
XGS
Enhanced optics layout is able to detect shallow scratches & defects on surface of the transparent wafers.
XGS can inspect both particle & surface roughness for transparent wafers with high sensitivity.
Spec
| Model | XGS |
|---|---|
| Loading type | Semi-Auto Auto loading |
| Dimension | Semi-Auto：(W)1150 (D)1150 (H)1919mm Auto loading：(W)1800 (D)1530 (H)1960mm |
| Utility (Power) | AC 200V |
| Utility (Vacuum) | -70kPa -40kPa |
| Utility (Compressed air) | 0.3Mpa |
| Wafer size | 2-8inch |
| Wafer material | Fused silica, Synthetic Quartz, GaN, AlN, LT/LN |